Design features of multi-chip comparison chip device of vacuum coating machine

1) Fixed cylinder 3 The design of cylindrical shape, large diameter, thick-walled structure and circumferentially symmetrical fixing method can ensure sufficient strength and rigidity, and at the same time, it can also prevent high-temperature sputtering abrasive from contaminating its internal parts , to ensure the flexibility of the rotation of the dial 15 .

2) The design of the circular bearing seat 2 ensures the sealing and verticality of the bearing seat installation; increase the diameter of the shaft 1, increase the installation distance between the two bearings in the bearing seat 2, improve its own strength and rigidity, ensure The rigidity of the shaft 1 and the rotational flexibility of the dial 15 during the rotation process are consistent with the repeatability of the position.

3) Loading the transposition mechanism, by expanding the diameter of the support plate 16, the effective area of the mechanism in the plane direction is increased, and a comparative film with a large diameter (Φ26.5mm) can be installed, which is conducive to the adjustment of the optical path and improves the quality of the optical film; The comparison piece 12 is made of a single piece of glass as a comparison piece unit. The comparison piece adopts the spatial three-dimensional stacking installation method. Multiple pieces of glass are stacked and installed in a comparison piece storage cylinder 13, so that 50~100 pieces of comparison pieces can be placed at a time, which solves the problem of the coating machine. Coating multi-layer precision optical films, compared with the problem that the small number of sheets affects the number of coating layers and the accuracy.

4) The cooperation of the positioning plate 6 and the slot-type optical coupling 17, through the slot-type optical coupling, the three equally divided 120° slits on the positioning plate are sensed, and the rotation of the motor is controlled to stop. The consistency of the rotation and positioning of the axis 1 is guaranteed to be repeated, and the dial 15 is driven to complete the accurate dial action.

5) The rotary seal feed-in mechanism is introduced into the Wilson seal mechanism 5, which not only ensures that the motor 9 drives the flexible rotation of the shaft 1 through gear meshing, but also ensures the sealing effect of the vacuum chamber to the outside. The optimized design of the multi-chip comparison device of the vacuum coating machine has the following characteristics: (1) Simple structure, high strength and good reliability; (2) The number of comparison chips is large, the production efficiency is improved, and ultra-multi-layer precision optics can be coated (3) The diameter of the comparative film is increased, the precision of the film monitoring is improved, the requirements for the hardware system are reduced, and the system is easy to realize automatic control; (4) The maintenance cost is low.

Through the optimized design of the multi-piece comparison piece device of the vacuum coating machine, the flexibility of the rotation of the comparison piece mechanism and the consistency of repetition are ensured, and the small effective area of the comparison piece, the inconvenient adjustment of the optical path, and the signal-to-noise ratio of the optical signal are solved. It also solves the problem of less loading of comparative sheets, which can greatly improve the quality of the optical film coated by the existing vacuum coating machine, and the optical film with more than 30 layers can be coated. Practice has proved that this comparative sheet structure is useful and can be promoted and implemented in the modern optical vacuum coating industry.