Glass coating machine use steps

Operation of the electric control cabinet

1. Turn on the water pump and air source.

2. Turn on the main power.

3. Turn on the power supply of the maintenance pump and the vacuum gauge, and the position of the vacuum gauge is V1, wait for the value to be less than 10, and then go to the next step. It takes about 5 minutes.

4. Turn on the mechanical pump, pre-pump, turn on the power of the turbo molecular pump, start it, change the switch of the vacuum gauge to the V2 position, and pump it down to less than 2, which takes about 20 minutes.

5. After the reading of the turbo molecular pump reaches 250, turn off the vacuum pump, open the front engine and the high valve and continue to vacuumize. After the vacuum reaches a certain level, the high vacuum meter on the right can be opened to observe the vacuum degree. The electron gun power can only be turned on after the vacuum reaches 2×10-3.

Operation of DEF-6B Electron Gun Power Supply Cabinet

1. General power supply.

2. Turn on the power supply of electron gun control I and electron gun control II at the same time: press the power supply of electron gun control I, the delay switch, the delay, power and protection lights will be on, and the delay and protection lights will be off after three minutes, if the back door is not closed or the water flow relay has If there is a fault, the protection light will always be on.

3. Turn on the high voltage, the high voltage will reach more than 10KV, adjust the beam current to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1~1.7.

Shutdown sequence

1. Turn off the high vacuum gauge and the molecular pump.

2. When the molecular pump display reaches 50, turn off the valve, the front stage, and the mechanical pump in sequence. This period will take about 40 minutes.

3. When it is below 50, turn off the maintenance pump again.