Several reasons why the vacuum coating machine is too slow

The reason why the vacuum coating machine is too slow is mainly from the following aspects:

First, the diffusion pump may not be very powerful.

Solution: You can use the ionization gauge to connect to the pump port of the diffusion pump to see how much the diffusion pump can pump alone, depending on the pumping time and limit, and then compare.

2. There is a slight leak in the vacuum system.

Solution: This requires a slow leak detection to see if the vacuum retention time can meet the standard.

3. The box is too dirty, and the air volume will be large if it is too dirty.

Solution: clean the box

Fourth, the vacuum degree of the front stage is not good, and the ultimate vacuum of the mechanical pump or the mechanical pump and the roots pump is not good.

Solution: You can use the resistance gauge to detect the foreline pipeline separately.